Product Name:
Insulating and Thermally Conductive Aluminum Nitride (AlN) Ceramic Vacuum Chuck
Product Material:
Aluminum Nitride (AlN) Ceramic
Material Characteristics:
High thermal conductivity for rapid heat dissipation, excellent electrical insulation, low thermal expansion matching semiconductor materials, high temperature stability up to 1800℃, strong chemical inertness, smooth surface suitable for precision vacuum adsorption
Application Fields:
High-temperature electronic component gripping, semiconductor manufacturing vacuum holding, LED chip and power module positioning, precision microelectronic workpiece clamping
Application Industries:
Semiconductor manufacturing, LED lighting and packaging, power electronics, aerospace electronics, precision machinery and microelectronic systems
Processing Difficulties:
High material hardness and machining difficulty, high-temperature sintering requires dimensional stability, precision grinding and polishing to avoid surface defects, vacuum surface flatness requires tight control
Processing Flow:
High-purity AlN powder preparation, forming by die pressing or cold isostatic pressing, high-temperature sintering, precision cutting and machining, vacuum surface grinding and polishing, dimensional and performance inspection
Delivery Period:
Standard specifications: 15–25 days, customized specifications: 20–35 days
The insulating and thermally conductive Aluminum Nitride (AlN) ceramic vacuum chuck is made from high-purity AlN ceramic, offering high thermal conductivity, excellent electrical insulation, and low thermal expansion. It is designed for vacuum gripping and precise positioning of semiconductors, LED chips, and microelectronic workpieces. The smooth, flat surface ensures reliable adsorption and stability under high-temperature operating conditions.
Key Features:
